Ultrapure Water System for Semiconductor Applications

Water Treatment Process: Single/Double-Stage Reverse Osmosis (RO), Double-Stage RO + EDI / Polishing
Product Water Output: 0.5 to 50 tons per hour
Product Water Quality: Resistivity ≥ 18.25 MΩ·cm or Conductivity ≤ 0.055 µS/cm
Footprint: 5–400 m²

Product Overview:

Ultrapure water for semiconductor applications is essential across the entire chip manufacturing process. It is used for:

• Front-end: Cooling during silicon ingot slicing and wafer processing

• Mid-process: Cleaning in sputtering, photolithography, electroplating, and etching

• Back-end: Cleaning in inspection and packaging

For LED chip manufacturing, ultrapure water is needed in:

• Epitaxial wafer growth (MOCVD stage)

• Photoresist exposure, development, and stripping

• Final inspection and packaging stages

The semiconductor industry also imposes stringent requirements for Total Organic Carbon (TOC) control.

Key Advantages:

1. High Efficiency and Quality:
   System configured with pre-treatment + RO mainframe for efficient removal of salts and impurities, ensuring water quality compliance with low operational cost.

2. Fully Automated AI Operation:
   Equipped with safety features such as low-pressure protection and water shortage alarms.

3. Compact and Integrated Design:
   Complete configuration with integrated structure, small footprint, easy to install and operate.

4. Premium Activated Carbon:
   Imported coconut shell activated carbon offers over 5x better adsorption than standard carbon, extending RO membrane lifespan.

5. Advanced Quartz Sand Filtration:
   Delivers 3x better filtration than standard sand, providing multi-layer protection for RO membranes.

6. High-Precision Dow RO Membranes:
   Filtration precision up to 0.0001 micron, producing ultrapure water suitable for direct drinking.

7. Vertical Booster Pump with Smart Output Protection:
   More convenient operation and improved reliability.

Applicable Industries:

• Pharmaceutical (GMP-compliant): IVD reagents, medical devices, surgical instruments, lab-grade pure water

• Battery Industry: Lead-acid, lithium-ion, and solar cells

• Electroplating: Metal and plastic plating, cooling systems, and lighting applications

• Cosmetics: Skincare, toiletries, hair dyes, wet wipes, and face masks

• Electronics: Aluminum foil, LCDs, transistors, CRTs, vacuum tubes

• Glass Coating: High-purity water for coated glass cleaning, lighting components, etc.

• Cleaning Industry: Coated glass, lighting, electroplating preparation, electrophoretic paint mixing, coating formulation, ultrasonic cleaning